JPH0623965Y2 - プローブカード - Google Patents
プローブカードInfo
- Publication number
- JPH0623965Y2 JPH0623965Y2 JP2521188U JP2521188U JPH0623965Y2 JP H0623965 Y2 JPH0623965 Y2 JP H0623965Y2 JP 2521188 U JP2521188 U JP 2521188U JP 2521188 U JP2521188 U JP 2521188U JP H0623965 Y2 JPH0623965 Y2 JP H0623965Y2
- Authority
- JP
- Japan
- Prior art keywords
- probe
- shape memory
- memory alloy
- substrate
- support piece
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000523 sample Substances 0.000 title claims description 71
- 229910001285 shape-memory alloy Inorganic materials 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 15
- 239000004020 conductor Substances 0.000 description 6
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910052790 beryllium Inorganic materials 0.000 description 2
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910000510 noble metal Inorganic materials 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000007774 longterm Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2521188U JPH0623965Y2 (ja) | 1988-02-29 | 1988-02-29 | プローブカード |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2521188U JPH0623965Y2 (ja) | 1988-02-29 | 1988-02-29 | プローブカード |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01132976U JPH01132976U (en]) | 1989-09-11 |
| JPH0623965Y2 true JPH0623965Y2 (ja) | 1994-06-22 |
Family
ID=31245747
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2521188U Expired - Lifetime JPH0623965Y2 (ja) | 1988-02-29 | 1988-02-29 | プローブカード |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0623965Y2 (en]) |
-
1988
- 1988-02-29 JP JP2521188U patent/JPH0623965Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01132976U (en]) | 1989-09-11 |
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